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Last edited by RenameBot
August 22, 2008 | History
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B. Bednář

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  • Cover of: Resists in microlithography and printing

    First published in 1993 — 1 edition
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Subjects

Design and construction, Electron beam Lithography, Integrated circuits, Microlithography, Semiconductors, Very large scale integration, X-ray lithography

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ID Numbers

  • OLID: OL829401A

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History

Download catalog record: RDF / JSON
August 22, 2008 Edited by RenameBot fix author name
April 1, 2008 Created by an anonymous user initial import