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Last edited by MARC Bot
November 14, 2020 | History
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Tommi Kääriäinen

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  • Cover of: Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

    First published in 2013 — 5 editions
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Subjects

Atomic layer deposition, Chemical vapor deposition, Epitaxy, Microelectronics, Nanotechnology, Vapor-plating

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ID Numbers

  • OLID: OL8836097A

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History

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November 14, 2020 Created by MARC Bot import new book