Microlithography 1999: Advances in Resist Technology and Processing XVI

Proceedings of Spie 15-17 March 1999 Santa Clara, California (Proceedings of SPIE)

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Last edited by MARC Bot
July 19, 2024 | History

Microlithography 1999: Advances in Resist Technology and Processing XVI

Proceedings of Spie 15-17 March 1999 Santa Clara, California (Proceedings of SPIE)

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Language
English
Pages
1402

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Book Details


Classifications

Library of Congress

The Physical Object

Format
Paperback
Number of pages
1402
Dimensions
10.8 x 8.2 x 3.2 inches
Weight
7.2 pounds

ID Numbers

Open Library
OL11393142M
ISBN 10
0819431524
ISBN 13
9780819431523
OCLC/WorldCat
41792054

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Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 19, 2024 Edited by MARC Bot import existing book
October 8, 2020 Edited by ImportBot import existing book
July 31, 2020 Edited by ImportBot import existing book
February 6, 2019 Edited by MARC Bot import existing book
April 30, 2008 Created by an anonymous user Imported from amazon.com record