An edition of Emerging Lithographic Techniques VI (2002)

Emerging Lithographic Techniques VI

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Emerging Lithographic Techniques VI
Roxann L. Engelstad, Roxann L. ...
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Last edited by MARC Bot
November 15, 2023 | History
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An edition of Emerging Lithographic Techniques VI (2002)

Emerging Lithographic Techniques VI

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Publish Date
Publisher
SPIE Society of Photo-Optical Instrumentation Engi
Pages
508

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Subjects

Microlithography, X-ray lithography, X-rays, industrial applications, Masks (electronics), Lithography, electron beam, Electron beam Lithography, Congresses, Industrial applications, X-rays, Masks (Electronics)
Edition Availability
Cover of: Emerging Lithographic Techniques VI
Emerging Lithographic Techniques VI
April 30, 2002, SPIE Society of Photo-Optical Instrumentation Engi
Hardcover
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Book Details

Classifications

Library of Congress
TK7874.E526 2002, TK7874 .E526 2002

The Physical Object

Format
Hardcover
Number of pages
508

ID Numbers

Open Library
OL11393346M
ISBN 10
0819444340
ISBN 13
9780819444349
LCCN
2002512442
OCLC/WorldCat
50417948
Goodreads
5245986

Source records

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Library of Congress MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 15, 2023 Edited by MARC Bot import existing book
December 7, 2020 Edited by MARC Bot import existing book
October 8, 2020 Edited by ImportBot import existing book
July 31, 2020 Edited by ImportBot import existing book
April 30, 2008 Created by an anonymous user Imported from amazon.com record