An edition of Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York (1985)

Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York

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An edition of Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York (1985)

Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Published for the American Vacuum Society by the American Institute of Physics
Language
English
Pages
463

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Subjects
Congresses, Electron beam Lithography, Etching, Ion beam lithography, Lithography, Electron beam, Photolithography, Semiconductors

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Edition Availability
Cover of: Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York
Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York
1985, Published for the American Vacuum Society by the American Institute of Physics
in English
  • Not in Library
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Book Details

Edition Notes

Published also in the Jan./Feb. 1985 issue of the Journal of vacuum science and technolgy B, v. 3, no. 1.

Includes bibliographies and index.

Published in
New York
Genre
Congresses.

Classifications

Dewey Decimal Class
621.381/74

The Physical Object

Pagination
p. 41-463 :
Number of pages
463

ID Numbers

Open Library
OL14751693M
ISBN 10
0883184648
LCCN
84073561

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December 15, 2009 Edited by WorkBot link works
September 14, 2008 Created by ImportBot Imported from Oregon Libraries MARC record