An edition of Particle control for semiconductor manufacturing (1990)

Particle control for semiconductor manufacturing

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Cover of: Particle control for semiconductor manufacturing by [edited by] R.P. Donovan.
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Last edited by MARC Bot
July 25, 2024 | History
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An edition of Particle control for semiconductor manufacturing (1990)

Particle control for semiconductor manufacturing

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Publish Date
Publisher
M. Dekker
Language
English
Pages
464

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Subjects
Particles, Semiconductors, Defects, Design and construction, Semi-conducteurs, Défauts, Particules (Matière), TECHNOLOGY & ENGINEERING, Electronics, Solid State

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Edition Availability
Cover of: Particle control for semiconductor manufacturing
Particle control for semiconductor manufacturing
1990, M. Dekker
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Particle Control for Semiconductor Manufacturing
Particle Control for Semiconductor Manufacturing
1990, CRC Press LLC
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references.
Updated revision of the course notes distributed at a short course held on Apr. 19-21, 1988, in Research Triangle Park, N.C.

Published in
New York

Classifications

Dewey Decimal Class
621.381/52
Library of Congress
TK7871.85 .P358 1990, TK7871.85.P358 1990, TK7871.85 .P358 1990eb, TK7871.85 .D647 1990

The Physical Object

Pagination
xiii, 464 p. :
Number of pages
464

ID Numbers

Open Library
OL2220291M
ISBN 10
0824782429
LCCN
89049025
OCLC/WorldCat
45843769, 395442920
Goodreads
6504179

Source records

Scriblio MARC record
Better World Books record
Library of Congress MARC record
Promise Item
marc_columbia MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 25, 2024 Edited by MARC Bot import existing book
December 14, 2022 Edited by MARC Bot import existing book
December 5, 2022 Edited by ImportBot import existing book
November 9, 2020 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record