An edition of Optical microlithography XXI (2008)

Optical microlithography XXI

26-29 February 2008, San Jose, California, USA

by Harry J. Levinson

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An edition of Optical microlithography XXI (2008)

Optical microlithography XXI

26-29 February 2008, San Jose, California, USA

by Harry J. Levinson

0 Ratings
0 Want to read
0 Currently reading
0 Have read

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Publish Date

2008

Publisher

SPIE

Language

English

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1 Optical microlithography XXI: 26-29 February 2008, San Jose, California, USA 2008, SPIE in English 0819471097 9780819471093	aaaa Not in Library Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in: Bellingham, Wash
Series: Proceedings of SPIE -- v. 6924, Proceedings of SPIE--the International Society for Optical Engineering -- v. 6924.

Classifications

Library of Congress: TK7874 .O65 2008

The Physical Object

Pagination: 3 v. :

ID Numbers

Open Library: OL24539896M
ISBN 10: 0819471097
ISBN 13: 9780819471093
LCCN: 2010287642
OCLC/WorldCat: 229163483

Source records

Library of Congress MARC record

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Created December 16, 2010
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December 16, 2010

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Imported from Library of Congress MARC record

Optical microlithography XXI

26-29 February 2008, San Jose, California, USA

by Harry J. Levinson