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Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
2017, Taylor & Francis Group
in English
1138075396 9781138075399
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Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
2016, Taylor & Francis Group
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Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
2016, Taylor & Francis Group
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Semiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
2011, Taylor & Francis Group
in English
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Semiconductor device-based sensors for gas, chemical, and biomedical applications
2011, CRC
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Book Details
Table of Contents
Machine generated contents note: -- 1.1.
Introduction -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.2.
A1GaN Field-Effect Sensors -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.
Fabrication and Characterization of A1GaN/GaN Sensors -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.1.
Growth of the Heterostructure -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.2.
Sensor Processing -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.3.
Electrical Characterization of the A1GaN/GaN Heterostructure -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.4.
Technology Impact on the Surface and Sensor Properties -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.3.5.
Biocompatibility of the Sensor -- M. Gebinoga /-- A. Schober /-- I. Cimalla /-- V. Lebedev /-- V. Cimalla /-- V. Polyakov
1.4.
Measurement Conditions -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.1.
Buffer Solutions -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.2.
Characterization Setup -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.3.
Noise and Drift -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.4.
Cell-Based Sensor-CPFET -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.5.
NG 108-15 Nerve Cell Line -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.6.
Neurotransmitters-Acetylcholine -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.7.
Neuroinhibitors -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.4.8.
Cell Media -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.5.
Cell Coupling to an A1GaN/GaN ISFET -- V. Cimalla /-- I. Cimalla /-- V. Lebedev /-- A. Schober /-- V. Polyakov /-- M. Gebinoga
1.5.1.
Sensor Preparation -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.5.2.
Sensor Response to pH Changes in Cell Media with/without Cells -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.5.3.
Ion Sensitivity of AlGaN/GaN ISFETs -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.5.4.
Sensitivity of A1GaN/GaN ISFETs to Inhibitors -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.6.
Recording of Extracellular Signal -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.6.1.
Response on Single Inhibitors in SCZ Buffer -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.6.2.
Response on Single Inhibitors in DMEM -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.6.3.
Sensor Response on Different Neurotoxins -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.7.
Sensor Signal Simulation -- I. Cimalla /-- M. Gebinoga /-- V. Cimalla /-- V. Polyakov /-- V. Lebedev /-- A. Schober
1.7.1.
Self-Consistent Simulation of the Heterostructure Using a Site-Binding Model -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 1.7.2.
Estimation of the Ion Flux in Cleft -- V. Polyakov / -- V. Lebedev / -- A. Schober / -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla -- 1.8.
Summary -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober
Acknowledgments -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober
References -- I. Cimalla / -- M. Gebinoga / -- V. Cimalla / -- V. Polyakov / -- V. Lebedev / -- A. Schober -- 2.1.
Introduction -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.2.
Gas Sensing -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.2.1.
O2 Sensing -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.2.2.
CO2 Sensing -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.2.3.
CH4 Sensing -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.3.
Sensor Functionalization -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.4.
pH Measurement -- B.H. Chu /-- C.Y. Chang /-- F. Ren /-- Jenshan Lin /-- S.J. Pearton
2.5.
Exhaled Breath Condensate -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.6.
Heavy Metal Detection -- Jenshan Lin / -- F. Ren / -- S.J. Pearton / -- C.Y. Chang / -- B.H. Chu -- 2.7.
Biotoxin Sensors -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.7.1.
Botulinum -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.
Biomedical Applications -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.1.
pH Sensing in Breath Condensate -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.2.
Glucose Sensing -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.3.
Prostate Cancer Detection -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.4.
Kidney Injury Molecule Detection -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.5.
Breast Cancer -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.6.
Lactic Acid -- B.H. Chu / -- C.Y. Chang / -- S.J. Pearton / -- Jenshan Lin / -- F. Ren -- 2.8.7.
Chloride Ion Detection -- B.H. Chu /-- C.Y. Chang /-- F. Ren /-- Jenshan Lin /-- S.J. Pearton
2.8.7.1.
HEMT Functionalized with Ag/AgC1 -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.7.2.
HEMT Functionalized with InN -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.8.8.
Pressure Sensing -- S.J. Pearton / -- Jenshan Lin / -- C.Y. Chang / -- B.H. Chu / -- F. Ren -- 2.8.9.
Traumatic Brain Injury -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.9.
Endocrine Disrupter Exposure Level Measurement -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.10.
Wireless Sensors -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 2.11.
Summary and Conclusions -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton
Acknowledgments -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton
References -- B.H. Chu / -- C.Y. Chang / -- F. Ren / -- Jenshan Lin / -- S.J. Pearton -- 3.1.
Introduction -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.
A1GaN/GaN HEMT Schottky-Diode-Based Hydrogen Sensor -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang
3.2.1.
Basic Schottky Diode Hydrogen Sensor -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.1.1.
Device Structure and Fabrication -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.1.2.
Testing Procedure -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.1.3.
Experimental Results -- Byung Hwan Chu / -- Yu-Lin Wang / -- Travis J. Anderson / -- Jenshan Lin / -- Fan Ren / -- Stephen J. Pearton -- 3.2.2.
TiB2 Ohmic Contacts -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.3.
Effect of Humidity on Hydrogen Sensors -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.2.4.
Differential Sensor -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.3.
GaN Schottky Diode Sensor -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.3.1.
N-face and Ga-face Comparison -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang
3.3.1.1.
Device Structure and Fabrication -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.3.1.2.
Experimental Results -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.3.2.
W/Pt-Contacted GaN Schottky Diodes -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.
Nanostructured Wide-Bandgap Materials -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.1.
Hydrogen Sensors Based on ZnO Nanorods -- Fan Ren / -- Travis J. Anderson / -- Jenshan Lin / -- Yu-Lin Wang / -- Stephen J. Pearton / -- Byung Hwan Chu -- 3.4.1.1.
Device Structure and Fabrication -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.1.2.
Experimental Results -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.2.
GaN Nanowires -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang
3.4.3.
InN Nanobelts -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.4.4.
Single ZnO Nanowire -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang
Note continued: -- 3.5.
SiC Schottky Diode Hydrogen Sensor -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.
Wireless Sensor Network Development -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.1.
Sensor Module -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.1.1.
Description of Wireless Transceiver -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.1.2.
Description of Web Server -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.6.2.
Field Test -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang / -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren -- 3.6.2.1.
Initial Field Test Results -- Travis J. Anderson /-- Byung Hwan Chu /-- Fan Ren /-- Stephen J. Pearton /-- Jenshan Lin /-- Yu-Lin Wang
3.6.2.2.
Improved Field Test Results -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 3.7.
Summary -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang
Acknowledgments -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang
References -- Travis J. Anderson / -- Byung Hwan Chu / -- Fan Ren / -- Stephen J. Pearton / -- Jenshan Lin / -- Yu-Lin Wang -- 4.1.
Introduction -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.2.
Surface Properties of InN -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.2.1.
Electronic Properties -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.2.2.
Chemical Sensing Properties -- Yuh-Hwa Chang /-- Yen-Sheng Lu /-- J. Andrew Yeh /-- Yu-Liang Hong /-- Hong-Mao Lee /-- Shangjr Gwo
4.3.
InN-Based Chemical Sensors Development -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.1.
Ion-Selective Electrode (ISE) -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.1.1.
Device Fabrication -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.1.2.
Testing Procedure and Results -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.2.
Ion-Sensitive Field-Effect Transistor (ISFET) -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.3.2.1.
Device Fabrication -- Hong-Mao Lee / -- Shangjr Gwo / -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong -- 4.3.2.2.
Testing Procedure and Results -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 4.4.
Summary -- Yuh-Hwa Chang /-- Yen-Sheng Lu /-- J. Andrew Yeh /-- Yu-Liang Hong /-- Hong-Mao Lee /-- Shangjr Gwo
Acknowledgments -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo
References -- Yuh-Hwa Chang / -- Yen-Sheng Lu / -- J. Andrew Yeh / -- Yu-Liang Hong / -- Hong-Mao Lee / -- Shangjr Gwo -- 5.1.
Introduction -- Y.W. Heo / -- S.J. Pearton / -- D.P. Norton / -- F. Ren -- 5.2.
Basic Properties of ZnO -- F. Ren / -- D.P. Norton / -- Y.W. Heo / -- S.J. Pearton -- 5.3.
Dopants in ZnO -- F. Ren / -- D.P. Norton / -- S.J. Pearton / -- Y.W. Heo -- 5.4.
Ion Implantation -- S.J. Pearton / -- F. Ren / -- D.P. Norton / -- Y.W. Heo -- 5.5.
Etching of ZnO -- D.P. Norton / -- F. Ren / -- S.J. Pearton / -- Y.W. Heo -- 5.6.
Ohmic Contacts -- S.J. Pearton / -- F. Ren / -- D.P. Norton / -- Y.W. Heo -- 5.7.
Schottky Contact -- D.P. Norton / -- F. Ren / -- S.J. Pearton / -- Y.W. Heo -- 5.8.
Properties of Hydrogen in ZnO -- S.J. Pearton / -- F. Ren / -- D.P. Norton / -- Y.W. Heo -- 5.8.1.
Proton Implantation -- D.P. Norton / -- F. Ren / -- S.J. Pearton / -- Y.W. Heo -- 5.8.2.
Hydrogen Plasma Exposure -- S.J. Pearton / -- D.P. Norton / -- F. Ren / -- Y.W. Heo -- 5.9.
Ferromagnetism in ZnO -- S.J. Pearton /-- Y.W. Heo /-- D.P. Norton /-- F. Ren
5.9.1.
Ferromagnetism in Semiconductors -- Y.W. Heo / -- S.J. Pearton / -- D.P. Norton / -- F. Ren -- 5.9.2.
Spin Polarization in ZnO -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.9.3.
Nanorods -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.9.4.
Properties of Mn- and Co-Implanted Bulk ZnO -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.10.
Gas Sensing Using ZnO Thin Film -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.10.1.
Ethylene Sensing -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.10.2.
CO Sensing -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.11.
Transport in ZnO Nanowires -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.12.
ZnO Nanowire Schottky Diodes -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.13.
ZnO Nanowire MOSFET -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.14.
UV Nanowire Photodetectors -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.15.
Gas and Chemical Sensing -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.15.1.
Hydrogen Sensing with ZnO nanowires -- Y.W. Heo /-- F. Ren /-- D.P. Norton /-- S.J. Pearton
5.15.2.
Ozone Sensing -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.15.3.
pH Response -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.
Biological Sensing -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.1.
Surface Modification of ZnO -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.2.
Using Protein Immobilization for Ultrasensitive Detection of Proteins and Single Viruses -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.3.
Immobilization of Nucleic Acids on Nanowires for Biosensors for Genes and mRNA -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.4.
Direct Immobilization of Aptamers for Ultrasensitive Detection of Proteins and Drug Molecules -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.5.
ZnO Nanowires with Various Doping and Surface Chemistry Terminations -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.16.6.
A 3D Self-Consistent Simulator for a Biological Sensor -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton -- 5.17.
Summary -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton
Acknowledgments -- Y.W. Heo / -- F. Ren / -- D.P. Norton / -- S.J. Pearton
References -- Y.W. Heo /-- F. Ren /-- D.P. Norton /-- S.J. Pearton
6.1.
Introduction -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.
Models of BioFET Device Operation -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.
FET Operation -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.1.
Charge in a MOSFET -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.2.1.2.
Charge Sheet Models for MOSFETs -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.3.
Capacitance -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.4.
Operation of the BioFET -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.1.5.
Monitoring the Threshold Voltage -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski
6.2.2.
The Oxide Surface and the Electrolyte -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.2.1.
The Electrolyte and Double Layer -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.2.2.
The Oxide Surface in an Electrolyte -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.2.3.
Other Insulators -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.2.3.
Molecules on the Oxide Surface -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.3.1.
Linker Layer -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- M.J. Deen -- 6.2.3.2.
Charged Membrane-Especially Oligonucleotides -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski
6.2.3.3.
Electrostatics of Brushes and the Donnan Potential -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.4.
Membrane Model and Poisson-Boltzmann Analysis -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.4.1.
Donnan Potential -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.4.2.
Change with Hybridization -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.
Small-Signal Analysis and Sensitivities -- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski /-- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen
Note continued: -- 6.2.5.1.
Effects of pH and Hydroxyl Density -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.2.
Ion Sensitivity versus Charge Sensitivity -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.3.
Complexation -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.4.
Impermeable Linking Layer -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.5.
Permeable Linking Layer -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.5.6.
Transient Effects due to Mixing -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski
6.2.5.7.
Size of the Signal -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.6.
Large-Signal Models of the BioFET -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.2.7.
Limitations of the 1-D Model -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.7.1.
Manning Condensation -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.7.2.
Other Mechanisms for the Signal in a BioFET -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.7.3.
The Mystery of High Signals -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.2.8.
Comparison with Measurements -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski
6.2.9.
BioFET Simulations in 3-D -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.
Impedance Measurements on BioFETs -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.1.
Impedance of ISFETs, REFETs, and the First Biomembranes -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.3.1.1.
ISFETs -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.1.2.
REFETs -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.1.3.
Measurement of Differential Output with ISFFET/REFET Pairs -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.1.4.
First Impedance Studies of Protein Membranes -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski
6.3.1.5.
Series Resistance of the Electrolyte -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.2.
Membrane Sensors -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.2.1.
Ion-Selective Surfaces -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.2.2.
Antigen[-]Antibody Conjugation -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski / -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen -- 6.3.2.3.
Electrochemical (Faradaic) Impedance Spectroscopy -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.2.4.
EnFETs -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.3.
Detection of DNA Hybridization -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski
6.3.3.1.
SNP Detection in Prehybridized DNA -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.3.3.2.
SNP Detection for In Situ Hybridization -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- M.J. Deen -- 6.4.
MOS Nanowire BioFETs -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.1.
Bioaffinity Sensing with SiNWs -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.1.1.
Probe Target Binding and the Langmuir Model -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.1.2.
History -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.2.
SiNWs Grown by the VLS Method -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski
6.4.3.
Planar MOS Nanowires-No Gating -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.4.
Back-Gated Planar Sensors -- M.W. Shinwari / -- M.J. Deen / -- D. Landheer / -- N.G. Tarr / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- W.R. McKinnon -- 6.4.4.1.
Attomolar Detection of Proteins -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.4.2.
Demonstrations of Back-Gated SiNW Bioaffinity Sensor Performance -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.4.3.
Nanoribbons -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.5.
Eliminating the Oxide Layer -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.6.
Alternate Nanowire Fabrication Methods -- D. Landheer /-- W.R. McKinnon /-- W.H. Jiang /-- M.J. Deen /-- G. Dubey /-- N.G. Tarr /-- M.W. Shinwari /-- G. Lopinski
6.4.7.
Nanowire Electrical Models -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.7.1.
Cylindrical Membranes -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.7.2.
Determination of Nanowire Capacitance and Surface Potential -- M.W. Shinwari / -- M.J. Deen / -- D. Landheer / -- N.G. Tarr / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- W.R. McKinnon -- 6.4.7.3.
3-D Models -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.8.
Slow Response due to Diffusion -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski -- 6.4.9.
Conclusions -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- M.J. Deen / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- G. Lopinski
References -- D. Landheer / -- W.R. McKinnon / -- W.H. Jiang / -- G. Lopinski / -- G. Dubey / -- N.G. Tarr / -- M.W. Shinwari / -- M.J. Deen -- 7.1.
MEMS Introduction -- Z.M. Qi / -- H. Xie -- 7.1.1.
MEMS Overview -- Z.M. Qi /-- H. Xie
7.1.2.
MEMS Fabrication -- Z.M. Qi / -- H. Xie -- 7.1.3.
Chapter Outline -- Z.M. Qi / -- H. Xie -- 7.2.
Optical Sensing Principles -- Z.M. Qi / -- H. Xie -- 7.3.
MEMS-Based Fourier Transform Spectroscopy for Chemical Sensing -- Z.M. Qi / -- H. Xie -- 7.3.1.
Quantized States in Molecules -- Z.M. Qi / -- H. Xie -- 7.3.2.
Optical Spectroscopy -- Z.M. Qi / -- H. Xie -- 7.3.3.
Fourier Transform Spectroscopy -- Z.M. Qi / -- H. Xie -- 7.3.4.
Fourier Transform Infrared Spectroscopy -- Z.M. Qi / -- H. Xie -- 7.3.5.
MEMS FTIR -- Z.M. Qi / -- H. Xie -- 7.3.5.1.
MEMS Actuators -- Z.M. Qi / -- H. Xie -- 7.3.5.2.
Miniature FTIR Based on Electrostatic Micromirrors -- Z.M. Qi / -- H. Xie -- 7.3.5.3.
Miniature FTIR Based on Electromagnetic Micromirrors -- Z.M. Qi / -- H. Xie -- 7.3.5.4.
Miniature FTIR Based on Electrothermal Micromirrors -- Z.M. Qi / -- H. Xie -- 7.3.5.5.
A Mirror-Tilt-Insensitive (MTI) Fourier Transform Spectrometer -- Z.M. Qi / -- H. Xie -- 7.3.6.
Summary -- Z.M. Qi / -- H. Xie -- 7.4.
Interferometric MEMS Chemical and Biochemical Sensors -- Z.M. Qi / -- H. Xie -- 7.4.1.
Introduction -- Z.M. Qi /-- H. Xie
7.4.2.
Integrated Optical Mach-Zehnder Interferometer (MZI) Sensors -- Z.M. Qi / -- H. Xie -- 7.4.3.
Composite Waveguide-Based Polarimetric Interferometer (PI) Sensors -- Z.M. Qi / -- H. Xie -- 7.4.4.
Integrated Optical Young Interferometer (YI) Sensors -- Z.M. Qi / -- H. Xie -- 7.4.4.1.
Sensing Principle of Integrated Optical YI -- Z.M. Qi / -- H. Xie -- 7.4.4.2.
Slab-Type YI Sensors -- Z.M. Qi / -- H. Xie -- 7.4.4.3.
Stripe-Type YI Sensors -- Z.M. Qi / -- H. Xie -- 7.4.5.
Integrated Optical Fabry-Perot Interferometer (FPI) Sensor -- Z.M. Qi / -- H. Xie -- 7.4.6.
Conclusion -- Z.M. Qi / -- H. Xie
References -- Z.M. Qi /-- H. Xie.
Edition Notes
Includes bibliographical references and index.
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