An edition of Dry etching for microelectronics (1984)

Dry etching for microelectronics

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Cover of: Dry etching for microelectronics by Ronald A. Powell
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Last edited by MARC Bot
December 11, 2022 | History
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An edition of Dry etching for microelectronics (1984)

Dry etching for microelectronics

by

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Publish Date
Publisher
North-Holland Physics Pub., Distributors for the USA and Canada, Elsevier Science Pub. Co.
Language
English
Pages
299

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Subjects

Semiconductors, Etching, Plasma etching
Edition Availability
Cover of: Dry etching for microelectronics
Dry etching for microelectronics
1984, North-Holland Physics Pub., Distributors for the USA and Canada, Elsevier Science Pub. Co.
in English

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Book Details

Edition Notes

Bibliography: p. 223-294.
Includes index.

Published in
Amsterdam, New York, New York, N.Y
Series
Materials processing--theory and practices ;, v. 4, Materials processing, theory and practices ;, v. 4.

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7871.85 .D79 1984

The Physical Object

Pagination
xi, 299 p. :
Number of pages
299

ID Numbers

Open Library
OL2839348M
ISBN 10
0444869050
LCCN
84001145
OCLC/WorldCat
10913832
Goodreads
5362382

Source records

Library of Congress MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 11, 2022 Edited by MARC Bot import existing book
October 30, 2020 Edited by MARC Bot import existing book
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 13, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record