An edition of Optical Microlithography XXVII (2014)

Optical Microlithography XXVII

25-27 February 2014

by , , and

Optical Microlithography XXVII
Kafai Lai, Andreas Erdmann, SP ...
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Last edited by Tom Morris
January 17, 2023 | History
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An edition of Optical Microlithography XXVII (2014)

Optical Microlithography XXVII

25-27 February 2014

by , , and

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Publish Date
Publisher
SPIE
Language
English
Pages
762

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Subjects

Integrated circuits, Microlithography, X-ray lithography, Manufacturing processes, Congresses, Masks

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Edition Availability
Cover of: Optical Microlithography XXVII
Optical Microlithography XXVII: 25-27 February 2014
2014, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Classifications

Library of Congress
TK7835.O6659 2014, TK7835 .O6659 2014

ID Numbers

Open Library
OL28554702M
ISBN 13
9780819499752
LCCN
2014412914

Source records

Better World Books record
Library of Congress MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
January 17, 2023 Edited by Tom Morris merge authors
November 14, 2020 Edited by MARC Bot import existing book
August 4, 2020 Created by ImportBot Imported from Better World Books record