An edition of Optical Microlithography XXVIII (2015)

Optical Microlithography XXVIII

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Optical Microlithography XXVIII
Kafai Lai, Kafai Lai
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Last edited by ImportBot
August 4, 2020 | History
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An edition of Optical Microlithography XXVIII (2015)

Optical Microlithography XXVIII

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Publish Date
Publisher
SPIE
Language
English
Pages
668

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Subjects

Integrated circuits, X-ray lithography, Manufacturing processes
Edition Availability
Cover of: Optical Microlithography XXVIII
Optical Microlithography XXVIII
2015, SPIE
in English
  • Not in Library
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Book Details

Classifications

Library of Congress
TK7835

ID Numbers

Open Library
OL28575165M
ISBN 13
9781628415285

Source records

Better World Books record

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August 4, 2020 Created by ImportBot Imported from Better World Books record