Design and process integration for microelectronic manufacturing II [sic]

26-27 February 2004, Santa Clara, California, USA

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Last edited by MARC Bot
August 11, 2024 | History

Design and process integration for microelectronic manufacturing II [sic]

26-27 February 2004, Santa Clara, California, USA

  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
302

Buy this book

Previews available in: English

Book Details


Edition Notes

Includes bibliographical references and index.
2004 conference is the third conference in the series.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series,, v. 5379, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 5379.
Genre
Congresses.
Other Titles
Design and process integration for microelectronic manufacturing III

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7874 .D4746 2004, TK7874.D4746 2004

The Physical Object

Pagination
xxviii, 302 p. :
Number of pages
302

ID Numbers

Open Library
OL3328383M
ISBN 10
0819452920
LCCN
2004303081
OCLC/WorldCat
55483541
Goodreads
4481527

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
August 11, 2024 Edited by MARC Bot import existing book
August 2, 2023 Edited by ImportBot import existing book
December 8, 2020 Edited by MARC Bot import existing book
October 8, 2020 Edited by ImportBot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record