An edition of Micromachined devices and components VI
(2000)
Micromachined devices and components VI
18-19 September 2000, Santa Clara, USA
by Eric Peeters and Oliver Paul
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![Cover of: Micromachined devices and components VI by Eric Peeters, Oliver Paul, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA).](/images/icons/avatar_book.png){kind=icon}
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Micromachined devices and components VI: 18-19 September 2000, Santa Clara, USA
2000, SPIE
in English
0819438324 9780819438324
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Includes bibliographical references and index.
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- Created April 1, 2008
- 4 revisions
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| January 17, 2023 | Edited by ImportBot | import existing book |
| December 4, 2020 | Edited by MARC Bot | import existing book |
| April 9, 2019 | Edited by MARC Bot | import existing book |
| April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |