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Subjects
Integrated circuits, Masks, MeasurementShowing 1 featured edition. View all 1 editions?
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Accurate linewidth measurement on integrated-circuit photomasks
1980, U.S. Dept. of Commerce, National Bureau of Standards : U.S. Govt. Print. Off. : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English
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Book Details
Edition Notes
Includes bibliographical references.
"Issued February 1980."
"Supported by the Defense Advanced Research Projects Agency ... and the National Bureau of Standards."
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- Created April 1, 2008
- 2 revisions
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October 18, 2020 | Edited by MARC Bot | import existing book |
April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |