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Table of Contents
1. Physical sputtering of single-element solids
2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
3. Characteristics of sputtered particles, technical applications.
Edition Notes
Includes bibliographical references and indexes.
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- Created April 1, 2008
- 9 revisions
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8 hours ago | Edited by MARC Bot | import existing book |
June 15, 2024 | Edited by ImportBot | import existing book |
October 21, 2020 | Edited by MARC Bot | import existing book |
July 7, 2019 | Edited by MARC Bot | import existing book |
April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |