An edition of A wafer chuck for use between -196 and 350C̊ (1979)

A wafer chuck for use between -196 and 350C̊

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A wafer chuck for use between -196 and 350C̊
R. Y. Koyama, R. Y. Koyama
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Last edited by MARC Bot
November 15, 2023 | History
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An edition of A wafer chuck for use between -196 and 350C̊ (1979)

A wafer chuck for use between -196 and 350C̊

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Publish Date
Publisher
Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
Language
English

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Subjects

Semiconductor wafers

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Edition Availability
Cover of: A wafer chuck for use between -196 and 350C̊
A wafer chuck for use between -196 and 350C̊
1979, Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English
  • Not in Library
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Book Details

Edition Notes

Sponsored by Division of Electric Energy Systems, Department of Energy and the Defense Advanced Research Projects Agency.

Includes bibliographical references.

Published in
Washington
Series
NBS special publication -- 400-55, Semiconductor measurement technology

ID Numbers

Open Library
OL49940721M
OCLC/WorldCat
4741666

Source records

marc_columbia MARC record

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November 15, 2023 Created by MARC Bot Imported from marc_columbia MARC record