An edition of Growth of wide-band gap A1N and (SiC)x(A1N)1-x thin films by reactive magnetron sputter deposition (2001)

Growth of wide-band gap A1N and (SiC)x(A1N)1-x thin films by reactive magnetron sputter deposition

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Last edited by MARC Bot
September 13, 2024 | History
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An edition of Growth of wide-band gap A1N and (SiC)x(A1N)1-x thin films by reactive magnetron sputter deposition (2001)

Growth of wide-band gap A1N and (SiC)x(A1N)1-x thin films by reactive magnetron sputter deposition

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Publish Date
Publisher
Thin Film Physics Division, Dept. of Physics and Measurement Technology, Linköpings universitet
Language
English

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Subjects

Thin films, Sputtering (Physics)

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Cover of: Growth of wide-band gap A1N and (SiC)x(A1N)1-x thin films by reactive magnetron sputter deposition
Growth of wide-band gap A1N and (SiC)x(A1N)1-x thin films by reactive magnetron sputter deposition
2001, Thin Film Physics Division, Dept. of Physics and Measurement Technology, Linköpings universitet
in English
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Book Details

Edition Notes

Thesis (doctoral)--Linköpings universitet, 2001.

Includes bibliographical references.

Published in
Linköping
Series
Linköping studies in science and technology -- no. 711

The Physical Object

Pagination
1 v. (various pagings)

ID Numbers

Open Library
OL53827275M
ISBN 10
9173730947
OCLC/WorldCat
48750551

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September 13, 2024 Created by MARC Bot Imported from harvard_bibliographic_metadata record