| Record ID | harvard_bibliographic_metadata/ab.bib.10.20150123.full.mrc:2717583:1649 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.10.20150123.full.mrc:2717583:1649?format=raw |
LEADER: 01649cam a2200337Ia 4500
001 010003137-4
005 20060807152849.0
008 060614s2006 waua b 101 0 eng d
020 $a081946225X
035 0 $aocm70109688
040 $aLHL$cLHL$dCUS
050 00 $aTK7874$b.S5927 2006
090 $aTA418.9.S62$bS537135 2006
245 00 $aSmart Structures and Materials 2006.$pSmart electronics, MEMS, bioMEMS, and nanotechnology :$b27 February-1 March, 2006, San Diego, California, USA /$cVijay K. Varadan, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by ASME--American Society of Mechanical Engineers (USA) ; cooperating organizations, Intelligent Materials Forum (Japan) ... [et al.].
246 30 $aSmart electronics, MEMS, bioMEMS, and nanotechnology
260 $aBellingham, Wash. :$bSPIE,$cc2006.
490 1 $aProceedings of SPIE,$x0277-786X ;$vv. 6172
504 $aIncludes bibliographical references and author index.
650 0 $aMicroelectronics$xMaterials$vCongresses.
650 0 $aSmart materials$vCongresses.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aActuators$vCongresses.
650 0 $aNanotechnology$vCongresses.
650 0 $aBiotechnology$vCongresses.
700 1 $aVaradan, V. K.,$d1943-
710 2 $aSociety of Photo-optical Instrumentation Engineers.
710 2 $aAmerican Society of Mechanical Engineers.
710 2 $aIntelligent Materials Forum (Mitō Kagaku Gijutsu Kyōkai)
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 6172.
988 $a20060627
906 $0OCLC