| Record ID | harvard_bibliographic_metadata/ab.bib.10.20150123.full.mrc:438337931:1208 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.10.20150123.full.mrc:438337931:1208?format=raw |
LEADER: 01208nam a2200301 a 4500
001 010572035-6
005 20070711161539.0
008 070615s2007 waua b 101|0 eng d
020 $a9780819467171
035 0 $aocn154954277
050 00 $aTK7875$b.S6354 2007
245 00 $aSmart sensors, actuators, and MEMS III :$b2-4 May 2007, Maspalomas, Gran Canaria, Spain /$cThomas Becker, Carles Cané, N. Scott Barker, editors.
260 $aBellingham, Wash. :$bSPIE,$cc2007.
300 $a1 v. (various pagings) :$bill. ;$c28 cm.
490 1 $aProceedings of SPIE,$x0277-786X ;$vv. 6589
504 $aIncludes bibliographical references and indexes.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aMicrotechnology$vCongresses.
650 0 $aActuators$xIndustrial applications$vCongresses.
650 0 $aDetectors$xIndustrial applications$vCongresses.
650 0 $aScanning systems$vCongresses.
700 1 $aBecker, Thomas.
700 1 $aCané, Carles.
700 1 $aBarker, N. Scott.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 6589.
988 $a20070615
906 $0MH