| Record ID | harvard_bibliographic_metadata/ab.bib.11.20150123.full.mrc:295766560:1047 |
| Source | harvard_bibliographic_metadata |
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LEADER: 01047cam a22002778a 4500
001 011352785-3
005 20080115141606.0
008 070330s2007 nyu b 001 0 eng
010 $a 2007013450
020 $a9780195320176 (pbk. : alk. paper)
035 0 $aocn226050530
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.C25 2007
082 00 $a621.3815/2$222
100 1 $aCampbell, Stephen A.,$d1954-
245 10 $aFabrication engineering at the micro and nanoscale /$cStephen A. Campbell.
250 $a3rd ed.
260 $aNew York, N.Y. :$bOxford University Press,$c2007.
300 $axvi, 647 p. :$bill. ;$c23 cm
490 0 $aThe Oxford series in electrical and computer engineering
500 $aRev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xDesign and construction.
700 1 $aCampbell, Stephen A.,$d1954-$tScience and engineering of microelectronic fabrication.
988 $a20080102
906 $0DLC