| Record ID | harvard_bibliographic_metadata/ab.bib.11.20150123.full.mrc:309790275:837 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.11.20150123.full.mrc:309790275:837?format=raw |
LEADER: 00837pam a2200265 a 4500
001 011365916-4
005 19970705000000.9
008 961223s1997 gw a b 001 0 eng
010 $a 96053992
020 $a3540606580 (hc : alk. paper)
035 0 $aocm36143623
040 $aDLC$cDLC$dDLC
050 00 $aTJ163$b.F38 1997
082 00 $a621$221
100 1 $aFatikow, S.$q(Sergej),$d1960-
245 10 $aMicrosystem technology and microrobotics /$cS. Fatikow, U. Rembold.
260 $aBerlin ;$aNew York :$bSpringer,$cc1997.
300 $axii, 408 p. :$bill. ;$c24 cm.
504 $aIncludes bibliographical references (p. [366]-401) and index.
650 0 $aElectromechanical devices$xDesign and construction.
650 0 $aMicrofabrication.
650 0 $aRobotics.
700 1 $aRembold, Ulrich.
988 $a20080118
906 $0DLC