| Record ID | harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:220747469:1621 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:220747469:1621?format=raw |
LEADER: 01621cam a2200337Ia 4500
001 012200500-7
005 20100308192008.0
008 100210s2009 paua b 101 0 eng
020 $a9781605111285
020 $a1605111287
035 0 $aocn505804375
040 $aLHL$cLHL$dYDXCP
090 $aTK7871.99.M44$bC1563 2009
245 00 $aCMOS gate-stack scaling-- materials, interfaces and reliability implications :$bsymposium held April 14-16, 2009 /$ceditors, Alexander A. Demkov ... [et al.].
260 $aWarrendale, Pa. :$bMaterials Research Society,$cc2009.
300 $aviii, 179 p. :$bill. ;$c24 cm.
490 1 $aMRS proceedings ;$vv. 1155
500 $a" ... Symposium C, 'CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- preface.
504 $aIncludes bibliographical references and indexes.
650 0 $aMetal oxide semiconductors, Complementary$vCongresses.
650 0 $aMetal oxide semiconductors$xMaterials$vCongresses.
650 0 $aSilicides$vCongresses.
650 0 $aGate array circuits$vCongresses.
711 2 $aSymposium C, "CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications$d(2009 :$cSan Francisco, Calif.)
700 1 $aDemkov, Alexander A.
710 2 $aMaterials Research Society.$bMeeting$d(2009 :$cSan Francisco, Calif.)
710 2 $aMaterials Research Society.$bFall Meeting$d(2009 :$cSan Francisco, Calif.)
830 0 $aMaterials Research Society symposia proceedings ;$vv. 1155.
988 $a20100211
049 $aMCSS
906 $0OCLC