| Record ID | harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:554457402:953 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:554457402:953?format=raw |
LEADER: 00953cam a22003254a 4500
001 012685157-3
005 20110225135418.0
008 050527s2006 njua b 001 0 eng
010 $a 2005048932
015 $aGBA556371$2bnb
016 7 $a013245250$2Uk
020 $a0131472860
020 $a9780131472860
035 0 $aocm60550857
040 $aDLC$beng$cDLC$dYDX$dUKM$dBAKER$dCOO$dBTCTA$dYDXCP$dOCLCG$dIG#$dDEBBG$dOCLCQ$dOCL
042 $apcc
050 00 $aTK7875$b.L48 2006
082 00 $a621.3$222
084 $aTEC 025f$2stub
084 $aZN 3750$2rvk
100 1 $aLiu, Chang,$cPh.D.
245 10 $aFoundations of MEMS /$cChang Liu.
260 $aUpper Saddle River, NJ :$bPearson/Prentice Hall,$cc2006.
300 $axxii, 530 p. :$bill. ;$c25 cm.
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems.
650 07 $aMEMS.$2swd
988 $a20110215
049 $aHLSS
906 $0DLC