| Record ID | harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:569386835:819 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:569386835:819?format=raw |
LEADER: 00819cam a22002654a 4500
001 012703618-0
005 20050826075029.0
008 040325s2004 nyua 001 0 eng
010 $a 2004040287
020 $a0071432418
035 0 $aocm54857930
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7871.85$b.V36 2004
082 00 $a621.3815/2$222
100 1 $aVan Zant, Peter.
245 10 $aMicrochip fabrication :$ba practical guide to semiconductor processing /$cPeter Van Zant.
250 $a5th ed.
260 $aNew York :$bMcGraw-Hill,$cc2004.
300 $axiii, 642 p. :$bill. ;$c24cm.
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xDesign and construction.
650 0 $aIntegrated circuits$xDesign and construction.
988 $a20110302
906 $0DLC