| Record ID | harvard_bibliographic_metadata/ab.bib.13.20150123.full.mrc:941767286:1885 |
| Source | harvard_bibliographic_metadata |
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LEADER: 01885nam a22004935a 4500
001 013832556-1
005 20131206194706.0
008 130426s1992 xxu| s ||0| 0|eng d
020 $a9781475767759
020 $a9781475767759
020 $a9781441932211
024 7 $a10.1007/978-1-4757-6775-9$2doi
035 $a(Springer)9781475767759
040 $aSpringer
050 4 $aQC176-176.9
072 7 $aPNFS$2bicssc
072 7 $aSCI077000$2bisacsh
082 04 $a530.41$223
100 1 $aBrodie, Ivor,$eeditor.
245 14 $aThe Physics of Micro/Nano-Fabrication /$cedited by Ivor Brodie, Julius J. Muray.
264 1 $aBoston, MA :$bSpringer US :$bImprint: Springer,$c1992.
300 $aXIX, 650 p.$bonline resource.
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
347 $atext file$bPDF$2rda
490 1 $aMicrodevices, Physics and Fabrication Technologies
520 $aIn this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
650 20 $aElectrical engineering.
650 20 $aCrystallography.
650 20 $aSolid state physics.
650 10 $aPhysics.
650 0 $aPhysics.
650 0 $aCrystallography.
650 0 $aComputer engineering.
650 0 $aOptical materials.
650 24 $aSpectroscopy and Microscopy.
650 24 $aCondensed Matter Physics.
650 24 $aOptical and Electronic Materials.
700 1 $aMuray, Julius J.,$eeditor.
776 08 $iPrinted edition:$z9781441932211
830 0 $aMicrodevices, Physics and Fabrication Technologies.
988 $a20131114
906 $0VEN