| Record ID | harvard_bibliographic_metadata/ab.bib.13.20150123.full.mrc:941837868:1809 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.13.20150123.full.mrc:941837868:1809?format=raw |
LEADER: 01809nam a22004815a 4500
001 013832603-7
005 20131206194724.0
008 130608s1993 xxu| s ||0| 0|eng d
020 $a9781489915221
020 $a9781489915221
020 $a9781489915245
024 7 $a10.1007/978-1-4899-1522-1$2doi
035 $a(Springer)9781489915221
040 $aSpringer
050 4 $aQC176-176.9
072 7 $aPNFS$2bicssc
072 7 $aSCI077000$2bisacsh
082 04 $a530.41$223
100 1 $aThong, John T. L.,$eeditor.
245 10 $aElectron Beam Testing Technology /$cedited by John T. L. Thong.
264 1 $aBoston, MA :$bSpringer US :$bImprint: Springer,$c1993.
300 $aXVI, 462 p.$bonline resource.
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
347 $atext file$bPDF$2rda
490 1 $aMicrodevices, Physics and Fabrication Technologies
520 $aThis is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology.
650 20 $aElectrical engineering.
650 20 $aCrystallography.
650 20 $aSolid state physics.
650 10 $aPhysics.
650 0 $aPhysics.
650 0 $aCrystallography.
650 0 $aComputer engineering.
650 0 $aOptical materials.
650 24 $aSpectroscopy and Microscopy.
650 24 $aCondensed Matter Physics.
650 24 $aOptical and Electronic Materials.
776 08 $iPrinted edition:$z9781489915245
830 0 $aMicrodevices, Physics and Fabrication Technologies.
988 $a20131114
906 $0VEN