| Record ID | ia:contaminationfre0000unse |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/contaminationfre0000unse/contaminationfre0000unse_marc.xml |
| Download MARC binary | https://www.archive.org/download/contaminationfre0000unse/contaminationfre0000unse_meta.mrc |
LEADER: 00856cam a22002414a 4500
001 2001028403
003 DLC
005 20060728213702.0
008 010308s2001 nyua b 001 0 eng
010 $a 2001028403
020 $a0824703804 (alk. paper)
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7871.85$b.C6175 2001
082 00 $a621.3815/2$221
245 00 $aContamination-free manufacturing for semiconductors and other precision products /$cedited by Robert P. Donovan.
260 $aNew York :$bMarcel Dekker,$c2001.
300 $ax, 448 p. :$bill. ;$c24 cm.
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xDesign and construction.
650 0 $aSemiconductors$xDefects.
700 1 $aDonovan, R. P.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0647/2001028403-d.html