| Record ID | ia:cwbeamprocessing0017unse |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/cwbeamprocessing0017unse/cwbeamprocessing0017unse_marc.xml |
| Download MARC binary | https://www.archive.org/download/cwbeamprocessing0017unse/cwbeamprocessing0017unse_meta.mrc |
LEADER: 00808cam 2200265Ia 4500
001 ocm11683740
003 OCoLC
005 20000204151245.0
008 850212s1984 flua b 001 0 eng d
020 $a0127521178
040 $aEUE$cEUE$dVPI$dCUS$dXFF
049 $aXFFA
090 $aQC612.S4$bW5 v. 17
245 00 $aCW beam processing of silicon and other semiconductors /$cvolume editor, James F. Gibbons.
260 $aOrlando, Fla. :$bAcademic Press,$c1984.
300 $axii, 458 p. :$bill. ;$c24 cm.
440 0 $aSemiconductors and semimetals ;$vv. 17
504 $aIncludes bibliographical references and index.
650 0 $aSilicon.
650 0 $aSemiconductors.
700 1 $aGibbons, James F.
907 $a.b19060403$bmulti$c-
902 $a070705
998 $b1$c000207$dm$ea$f-$g0
902 $asc