| Record ID | ia:designtestmicrof3680unse |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/designtestmicrof3680unse/designtestmicrof3680unse_marc.xml |
| Download MARC binary | https://www.archive.org/download/designtestmicrof3680unse/designtestmicrof3680unse_meta.mrc |
LEADER: 01046cam a22002534a 4500
001 00689203
003 DLC
005 20001031104545.0
008 000411s1999 waua b 101 0 eng
010 $a 00689203
020 $a0819431540
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7875$b.D47 1999
082 00 $a621.381$221
245 00 $aDesign, test, and microfabrication of MEMS and MOEMS :$b30 March-1 April 1999, Paris, France /$cBernard Courtois ... [et. al.], chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ... [et. al].
260 $aBellingham, Wash., USA :$bSPIE$cc1999.
300 $a2 v. (xix, 1192 p.) :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 3680
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems$vCongresses.
700 1 $aBourtois, Bernard.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 3680.