| Record ID | ia:electronicmateri0000mura |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/electronicmateri0000mura/electronicmateri0000mura_marc.xml |
| Download MARC binary | https://www.archive.org/download/electronicmateri0000mura/electronicmateri0000mura_meta.mrc |
LEADER: 02622cam 2200661 a 4500
001 ocm18874975
003 OCoLC
005 20200619220952.0
008 881110s1989 maua b 001 0 eng
010 $a 88034033
040 $aDLC$beng$cDLC$dMUQ$dBAKER$dBTCTA$dYDXCP$dCOF$dDEBBG$dGBVCP$dOCLCF$dNJI$dOCLCQ$dCSJ$dOCLCO$dOCLCQ$dCPO$dOCLCO$dOCLCA$dOCLCQ$dOCLCO$dUKBTH$dS2H$dUKMGB
016 7 $a009778708$2Uk
020 $a0125111207$q(alk. paper)
020 $a9780125111201$q(alk. paper)
035 $a(OCoLC)18874975
050 00 $aTK7871$b.M87 1989
080 0 $a688.102.8
082 00 $a621.3815/2$219
084 $aZN 3400$2rvk
084 $aELT 270f$2stub
084 $aELT 072f$2stub
100 1 $aMurarka, S. P.
245 10 $aElectronic materials :$bscience and technology /$cShyam P. Murarka, Martin C. Peckerar.
260 $aBoston :$bAcademic Press,$c©1989.
300 $axv, 622 pages :$billustrations ;$c24 cm
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
338 $avolume$bnc$2rdacarrier
504 $aIncludes bibliographical references and index.
505 0 $aEssentials of processing : a top down approach -- Starting materials -- Oxidation -- Diffusion -- Ion implantation -- Metallization -- Chemical vapor deposition nucleation and growth of thin solid films -- Lithographic tools -- Resist systems and exposure modeling -- Pattern transfer -- Future beam processes and in-situ processing.
650 0 $aElectronics$xMaterials.
650 0 $aSemiconductors.
650 1 $aSemiconductors.
650 6 $aÉlectronique$xMatériaux.
650 6 $aSemiconducteurs.
650 7 $aElectronics$xMaterials.$2fast$0(OCoLC)fst00907562
650 7 $aSemiconductors.$2fast$0(OCoLC)fst01112198
650 7 $aElektronik$2gnd
650 7 $aHalbleitertechnologie$2gnd
650 7 $aHalbleiterwerkstoff$2gnd
650 7 $aWerkstoff$2gnd
653 0 $aElectronics$aMaterials
653 0 $aSemiconductors
700 1 $aPeckerar, Martin Charles,$d1946-
856 41 $3Table of contents$uhttp://www.gbv.de/dms/bowker/toc/9780125111201.pdf
938 $aBaker & Taylor$bBKTY$c98.00$d98.00$i0125111207$n0001539936$sactive
938 $aBaker and Taylor$bBTCP$n88034033
938 $aYBP Library Services$bYANK$n58803
029 1 $aAU@$b000006143888
029 1 $aDEBBG$bBV003086814
029 1 $aGBVCP$b017123380
029 1 $aHEBIS$b193934299
029 1 $aNLGGC$b054051517
029 1 $aNZ1$b4254389
029 1 $aYDXCP$b58803
029 1 $aUKMGB$b009778708
994 $aZ0$bP4A
948 $hNO HOLDINGS IN P4A - 265 OTHER HOLDINGS