| Record ID | ia:fabricationengin0003camp |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/fabricationengin0003camp/fabricationengin0003camp_marc.xml |
| Download MARC binary | https://www.archive.org/download/fabricationengin0003camp/fabricationengin0003camp_meta.mrc |
LEADER: 01222cam a2200301 a 4500
001 2007013450
003 DLC
005 20080126090612.0
008 070330s2008 nyua b 001 0 eng
010 $a 2007013450
020 $a9780195320176 (pbk. : alk. paper)
020 $a0195320174 (pbk. : alk. paper)
035 $a(OCoLC)ocn122338108
035 $a(OCoLC)122338108
040 $aDLC$cDLC$dYDX$dBAKER$dBTCTA$dYDXCP$dDLC
050 00 $aTK7871.85$b.C25 2008
082 00 $a621.3815/2$222
100 1 $aCampbell, Stephen A.,$d1954-
245 10 $aFabrication engineering at the micro and nanoscale /$cStephen A. Campbell.
250 $a3rd ed.
260 $aNew York :$bOxford University Press,$c2008.
300 $axiv, 647 p. :$bill. ;$c24 cm.
440 4 $aThe Oxford series in electrical and computer engineering
500 $aRev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xDesign and construction.
700 1 $aCampbell, Stephen A.,$d1954-$tScience and engineering of microelectronic fabrication.
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/toc/ecip0714/2007013450.html