| Record ID | ia:filmsynthesisgro0388unse |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/filmsynthesisgro0388unse/filmsynthesisgro0388unse_marc.xml |
| Download MARC binary | https://www.archive.org/download/filmsynthesisgro0388unse/filmsynthesisgro0388unse_meta.mrc |
LEADER: 01032cam a2200253 a 4500
001 95031836
003 DLC
005 20090521082920.0
008 950717s1995 paua b 001 0 eng
010 $a 95031836
020 $a155899291X (alk. paper)
040 $aDLC$cDLC$dDLC
050 00 $aTA418.9.T45$bF54 1995
082 00 $a621.3815/2$220
245 00 $aFilm synthesis and growth using energetic beams :$bsymposium held April 17-20, 1995, San Francisco, California, U.S.A. /$ceditors, H.A. Atwater ... [et al.].
260 $aPittsburgh, Pa. :$bMaterials Research Society,$cc1995.
300 $axv, 446 p. :$bill. ;$c24 cm.
490 1 $aMaterials Research Society symposium proceedings ;$vv. 388
504 $aIncludes bibliographical references and indexes.
650 0 $aThin films$xCongresses.
650 0 $aIon implantation$xCongresses.
650 0 $aLaser beams$xIndustrial applications$xCongresses.
700 1 $aAtwater, Harry A.$q(Harry Albert),$d1960-
830 0 $aMaterials Research Society symposia proceedings ;$vv. 388.