| Record ID | ia:isbn_0819407259_1594 |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/isbn_0819407259_1594/isbn_0819407259_1594_marc.xml |
| Download MARC binary | https://www.archive.org/download/isbn_0819407259_1594/isbn_0819407259_1594_meta.mrc |
LEADER: 01374nam a2200301 a 4500
001 91067547
003 DLC
005 19930211172415.5
008 920226s1992 waua b 101 0 eng
010 $a 91067547
020 $a0819407259 (pbk.)
040 $aDLC$cDLC
050 00 $aTK7836$b.P74 1992
082 00 $a621.381$220
245 00 $aProcess module metrology, control, and clustering :$b11-13 September 1991, San Jose, California /$cCecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash. :$bSPIE,$cc1992.
300 $aix, 419 p. :$bill. ;$c28 cm.
490 1 $aProceedings / SPIE--the International Society for Optical Engineering ;$vv. 1594
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectronics industry$xProduction control$xCongresses.
650 0 $aIntegrated circuits$xDesign and construction$xCongresses.
650 0 $aOptical detectors$xIndustrial applications$xCongresses.
650 0 $aManufacturing processes$xAutomation$xCongresses.
700 10 $aDavis, Cecil J.
700 10 $aHerman, Irving P.
700 10 $aTurner, Terry R.
710 20 $aSociety of Photo-Optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for OPtical Engineering ;$vv. 1594.