| Record ID | ia:isbn_0819439622_4284 |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/isbn_0819439622_4284/isbn_0819439622_4284_marc.xml |
| Download MARC binary | https://www.archive.org/download/isbn_0819439622_4284/isbn_0819439622_4284_meta.mrc |
LEADER: 01227cam a22003017a 4500
001 2002265872
003 DLC
005 20050223151623.0
008 020228s2001 waua b 101 0 eng d
010 $a 2002265872
020 $a0819439622
035 $a(OCoLC)ocm47205036
040 $aCUS$cCUS$dDLC
042 $alccopycat
050 00 $aTK8300$b.F85 2001
082 00 $a621.381$221
245 00 $aFunctional integration of opto-electro-mechanical devices and systems :$b24-25 January 2001, San Jose, USA /$cMichael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
260 $aBellingham, Wash. :$bSPIE,$cc2001.s
300 $axxx, 152 p. :$bill. ;$c28 cm.
490 1 $aSPIE proceedings series ;$vv. 4284
504 $aIncludes bibliographical references and index.
650 0 $aOptoelectronic devices$vCongresses.
650 0 $aMicroelectromechanical systems$vCongresses.
650 0 $aMicroelectronic packaging$vCongresses.
700 1 $aDescour, Michael R.
700 1 $aRantala, Juha T.
710 2 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4284.