| Record ID | ia:microsystemdesig0000sent |
| Source | Internet Archive |
| Download MARC XML | https://archive.org/download/microsystemdesig0000sent/microsystemdesig0000sent_marc.xml |
| Download MARC binary | https://www.archive.org/download/microsystemdesig0000sent/microsystemdesig0000sent_meta.mrc |
LEADER: 00961cam a22002654a 4500
001 00048768
003 DLC
005 20080311080923.0
008 000921s2001 maua b 001 0 eng
010 $a 00048768
020 $a0792372468 (alk. paper)
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7875$b.S46 2000
082 00 $a621.381$221
100 1 $aSenturia, Stephen D.,$d1940-
245 10 $aMicrosystem design /$cStephen D. Senturia.
260 $aBoston :$bKluwer Academic Publishers,$c2001.
300 $axxvi, 689 p. :$bill. ;$c24 cm.
504 $aIncludes bibliographical references (p. [665]-676) and index.
650 0 $aMicroelectromechanical systems$xDesign and construction.
650 0 $aSystem design.
650 0 $aMicroelectronics.
856 42 $3Publisher description$uhttp://www.loc.gov/catdir/enhancements/fy0821/00048768-d.html
856 41 $3Table of contents only$uhttp://www.loc.gov/catdir/enhancements/fy0821/00048768-t.html