| Record ID | marc_columbia/Columbia-extract-20221130-002.mrc:252940378:2090 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-002.mrc:252940378:2090?format=raw |
LEADER: 02090cam a2200385 a 4500
001 700629
005 20220525225636.0
008 881215t19881988waua b 101 0 eng d
020 $a0892529814
035 $a(OCoLC)261574259
035 $a(OCoLC)ocn261574259
035 $a(CStRLIN)NYCG88-B87018
035 $9ADB1123CU
035 $a(NNC)700629
035 $a700629
040 $aNjR$cNjR
090 $aTK7871.85$b.S725 1988g
245 00 $aSpectroscopic characterization techniques for semiconductor technology III :$b14-15 March 1988, Newport Beach, California /$cOrest J. Glembocki, Fred H. Pollak, Fernando Ponce, chairs/editors ; sponsored by Optical Society of America, SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society.
260 $aBellingham, Wash., USA :$bSPIE,$c[1988], ©1988.
300 $aviii, 234 pages :$billustrations ;$c29 cm.
336 $atext$2rdacontent
337 $aunmediated$2rdamedia
338 $avolume$2rdacarrier
490 1 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 946
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xTesting$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2010112608
650 0 $aSpectrum analysis$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2008111219
700 1 $aGlembocki, O. J.$0http://id.loc.gov/authorities/names/n87935464
700 1 $aPollak, Fred H.$0http://id.loc.gov/authorities/names/n84172044
700 1 $aPonce, Fernando.$0http://id.loc.gov/authorities/names/n85236120
710 2 $aOptical Society of America.$0http://id.loc.gov/authorities/names/n82091895
710 2 $aSociety of Photo-optical Instrumentation Engineers.$0http://id.loc.gov/authorities/names/n78088934
710 2 $aMetallurgical Society (U.S.)$0http://id.loc.gov/authorities/names/n86031735
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 946.$0http://id.loc.gov/authorities/names/n42030541
852 00 $boff,eng$hTK7871.85$i.S725 1988g