| Record ID | marc_columbia/Columbia-extract-20221130-002.mrc:55930038:1404 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-002.mrc:55930038:1404?format=raw |
LEADER: 01404cam a2200349 a 4500
001 544835
005 20220525194847.0
008 870320s1986 flua b 001 0 eng
010 $a 86003524
020 $a0120771209
035 $a(OCoLC)13426011
035 $a(OCoLC)ocm13426011
035 $a(CStRLIN)NYCG87-B25094
035 $9ACJ7274CU
035 $a(NNC)544835
035 $a544835
050 00 $aTK7871.85$b.E65 1986
082 0 $a621.3815/2$219
090 $aTK7871.85$b.E65 1986
245 00 $aEpitaxial silicon technology /$cedited by B. Jayant Baliga.
260 $aOrlando :$bAcademic Press,$c1986.
300 $aviii, 328 pages :$billustrations ;$c24 cm
336 $atext$2rdacontent
337 $aunmediated$2rdamedia
338 $avolume$2rdacarrier
500 $aIncludes bibliographies and index.
505 0 $aSilicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam.
650 0 $aSemiconductors$xDesign and construction.
650 0 $aSilicon crystals$xGrowth.
650 0 $aEpitaxy.$0http://id.loc.gov/authorities/subjects/sh85044462
700 1 $aBaliga, B. Jayant,$d1948-$0http://id.loc.gov/authorities/names/n84034451
852 00 $boff,eng$hTK7871.85$i.E65 1986