| Record ID | marc_columbia/Columbia-extract-20221130-004.mrc:620223531:1579 |
| Source | marc_columbia |
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LEADER: 01579mam a2200313 a 4500
001 1983623
005 20220609043024.0
008 961223t19971997gw a b 001 0 eng
010 $a 96053992
020 $a3540606580 (hc : alk. paper)
035 $a(OCoLC)ocm36143623
035 $9AMK2934CU
035 $a1983623
040 $aDLC$cDLC$dC#P$dOrLoB-B
050 00 $aTJ163$b.F38 1997
082 00 $a621$221
100 1 $aFatikow, S.$q(Sergej),$d1960-$0http://id.loc.gov/authorities/names/n96122830
245 10 $aMicrosystem technology and microrobotics /$cS. Fatikow, U. Rembold.
260 $aBerlin ;$aNew York :$bSpringer,$c[1997], ©1997.
300 $axii, 408 pages :$billustrations ;$c25 cm
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
504 $aIncludes bibliographical references (p. [366]-401) and index.
505 00 $g1.$tIdeas and Problems of Microsystem Technology and Microrobotics --$g2.$tMicrosystems Technology Applications --$g3.$tTechniques of Microsystem Technology --$g4.$tKey Processes to Produce Micromechanical Components --$g5.$tMicroactuators: Principles and Examples --$g6.$tMicrosensors: Principles and Examples --$g7.$tMST and Information Processing --$g8.$tMicrorobotics.
650 0 $aElectromechanical devices$xDesign and construction.
650 0 $aMicrofabrication.$0http://id.loc.gov/authorities/subjects/sh96011316
650 0 $aRobotics.$0http://id.loc.gov/authorities/subjects/sh85114628
700 1 $aRembold, Ulrich.$0http://id.loc.gov/authorities/names/n80089291
852 00 $boff,eng$hTJ163$i.F38 1997