| Record ID | marc_columbia/Columbia-extract-20221130-007.mrc:166523794:1545 |
| Source | marc_columbia |
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LEADER: 01545mam a22002895a 4500
001 3144478
005 20221019232716.0
008 011120s2002 caua b 000 0 eng d
010 $a 2001089414
020 $a0125249756
035 $a(OCoLC)ocm48463437
035 $9ATY1093CU
035 $a3144478
040 $aSOE$cSOE$dOrLoB-B
090 $aTA418.9.T45$bO47 2002
100 1 $aOhring, Milton,$d1936-$0http://id.loc.gov/authorities/names/n91018108
245 14 $aThe materials science of thin films :$bdeposition and structure /$cMilton Ohring.
250 $a2nd ed.
260 $aSan Diego, CA :$bAcademic Press,$c2002.
300 $axxi, 794 pages :$billustrations ;$c24 cm
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
500 $aPrevious ed.: 1992.
504 $aIncludes bibliographic references and index.
505 00 $gCh. 1.$tA Review of Materials Science --$gCh. 2.$tVacuum Science and Technology --$gCh. 3.$tThin-Film Evaporation Processes --$gCh. 4.$tDischarges, Plasmas, and Ion-Surface Interactions --$gCh. 5.$tPlasma and Ion Beam Processing of Thin Films --$gCh. 6.$tChemical Vapor Deposition --$gCh. 7.$tSubstrate Surfaces and Thin-Film Nucleation --$gCh. 8.$tEpitaxy --$gCh. 9.$tFilm Structure --$gCh. 10.$tCharacterization of Thin Films and Surfaces --$gCh. 11.$tInterdiffusion, Reactions, and Transformations in Thin Films --$gCh. 12.$tMechanical Properties of Thin Films.
650 0 $aThin films.$0http://id.loc.gov/authorities/subjects/sh85134864
852 00 $boff,eng$hTA418.9.T45$iO47 2002g