| Record ID | marc_columbia/Columbia-extract-20221130-007.mrc:363657501:1607 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-007.mrc:363657501:1607?format=raw |
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001 3359945
005 20221020052715.0
008 020814t20012001xxua b 100 0 eng d
020 $a0963825100
035 $a(OCoLC)506097944
035 $a(OCoLC)ocn506097944
035 $9AVB8646CU
035 $a(NNC)3359945
035 $a3359945
040 $aNNC$cNNC
050 4 $aTK7871.85$b.I574 2001
111 2 $aInternational Conference on Advanced Thermal Processing of Semiconductors$n(9th :$d2001 :$cHilton Anchorage, Alaska)
245 10 $a9th International Conference on Advanced Thermal Processing of Semiconductors :$bRTP 2001 : September 25-29, 2001, Hilton Anchorage, Alaska /$cD.P. DeWitt [and others], editors.
246 30 $aRTP 2001
260 $a[Place of publication not identified] :$bRTP Conference,$c[2001], ©2001.
300 $a326 pages :$billustrations
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
500 $a"IEEE Catalog Number: 02EX513"--T.p. verso.
504 $aIncludes bibliographical references.
650 0 $aSemiconductors$xHeat treatment$vCongresses.
650 0 $aRapid thermal processing$vCongresses.
650 0 $aSemiconductor doping$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2010112585
650 0 $aSemiconductors$xDefects$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2008111512
700 1 $aDeWitt, David P.,$d1934-2005.$0http://id.loc.gov/authorities/names/n50003117
740 0 $aAdvanced Thermal Processing of Semiconductors 9th International Conference on RTP 2001.
852 00 $boff,eng$hTK7871.85$i.I46 2001g