| Record ID | marc_columbia/Columbia-extract-20221130-007.mrc:441066080:2502 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-007.mrc:441066080:2502?format=raw |
LEADER: 02502mam a2200409 a 4500
001 3432746
005 20221020072939.0
008 030321t20032003wau 101 0 eng d
020 $a0819447838
035 $a(OCoLC)ocm51894276
035 $9AVR1636CU
035 $a(NNC)3432746
035 $a3432746
040 $aCUS$cCUS
090 $aTK7874$b.M5326 2003
245 00 $aMOEMS and miniaturized systems III :$b27-29 January 2003, San Jose, California, USA /$cJames H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA).
246 3 $aMicroelectromechanical systems and miniaturized systems III
260 $aBellingham, Wash., USA :$bSPIE,$c[2003], ©2003.
300 $axlvi, 368 pages :$billustrations (some color) ;$c28 cm.
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
490 1 $aSPIE proceedings series,$x0277-786X ;$vv. 4983
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2008107748
650 0 $aMiniature electronic equipment$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2010101974
650 0 $aMicromechanics$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2008107600
650 0 $aOptics, Adaptive$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2008108679
650 0 $aOptical scanners$vCongresses.$0http://id.loc.gov/authorities/subjects/sh2010104476
700 1 $aSmith, James H.$0http://id.loc.gov/authorities/names/n99037615
700 1 $aKrulevitch, Peter A.$q(Peter Allen)$0http://id.loc.gov/authorities/names/no2010109092
700 1 $aLakner, Hubert K.
710 2 $aSociety of Photo-optical Instrumentation Engineers.$0http://id.loc.gov/authorities/names/n78088934
710 2 $aSemiconductor Equipment and Materials International.$0http://id.loc.gov/authorities/names/n90682619
710 2 $aSolid State Technology (Organization)$0http://id.loc.gov/authorities/names/n98059169
710 2 $aSandia National Laboratories.$0http://id.loc.gov/authorities/names/n80115974
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 4983.$0http://id.loc.gov/authorities/names/n42030541
852 00 $boff,eng$hTK7874$i.M5326 2003g