| Record ID | marc_columbia/Columbia-extract-20221130-012.mrc:108875537:2445 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-012.mrc:108875537:2445?format=raw |
LEADER: 02445pam a22003374a 4500
001 5617511
005 20221121194339.0
008 060428s2006 nyua b 001 0 eng
010 $a 2005056888
020 $a0750309768
035 $a(OCoLC)OCM62290646
035 $a(NNC)5617511
035 $a5617511
040 $aDLC$cDLC$dBAKER$dC#P$dOrLoB-B
042 $apcc
050 00 $aTA2020$b.M35 2006
082 00 $a621.044$222
100 1 $aMakabe, T.$q(Toshiaki)$0http://id.loc.gov/authorities/names/n2002012537
245 10 $aPlasma electronics :$bapplications in microelectronic device fabrication /$cT. Makabe, Z. Petrović.
260 $aNew York :$bTaylor & Francis,$c2006.
300 $a339 pages :$billustrations ;$c25 cm.
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
490 1 $aSeries in plasma physics
504 $aIncludes bibliographical references and index.
505 00 $g1.$tIntroduction -- $g2.$tPhenomenological description of the charged particle transport -- $g3.$tMacroscopic plasma characteristics -- $g4.$tElemental processes in gas phase and on surfaces -- $g5.$tThe Boltzmann equation and transport equations of charged particles -- $g6.$tGeneral properties of charged particle transport in gases -- $g7.$tModeling of nonequilibrium (low-temperature) plasmas -- $g8.$tNumerical procedure of modeling -- $g9.$tCapacitively coupled plasma -- $g10.$tInductively coupled plasma -- $g11.$tMagnetically enhanced plasma -- $g12.$tPlasma processing and related topics.
520 1 $a"Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory."--BOOK JACKET.
650 0 $aPlasma engineering.$0http://id.loc.gov/authorities/subjects/sh85103069
700 1 $aPetrović, Z.$0http://id.loc.gov/authorities/names/no97032180
830 0 $aSeries in plasma physics.$0http://id.loc.gov/authorities/names/no2002001630
852 00 $boff,eng$hTA2020$i.M35 2006