MARC Record from marc_columbia

LEADER: 06506cam a2200793 a 4500
001 7887592
005 20220903224015.0
006 m o d
007 cr cnu---unuuu
008 071213s1998 ne a obf 000 0 eng d
035 $a(OCoLC)ocn183633551
035 $a(NNC)7887592
040 $aKNOVL$beng$epn$cKNOVL$dN$T$dEBLCP$dIDEBK$dOCLCQ$dKNOVL$dZCU$dKNOVL$dOCLCF$dOCLCQ$dOCLCO$dOPELS$dE7B$dKNOVL$dYDXCP$dOCL$dOCLCQ$dVT2$dDEBSZ$dUAB$dOCLCQ$dBUF$dD6H$dCEF$dRRP$dNLE$dAU@$dOCLCQ$dWYU$dUKMGB$dOCLCQ$dYOU$dLEAUB$dUWW$dOL$$dOCLCO$dERF$dOCLCO$dOCLCQ$dHS0$dOCLCQ$dMM9$dS2H$dOCLCO$dOCLCQ$dOCLCO$dLVT$dERD$dOCLCO$dCOM$dOCLCO$dOCLCQ
015 $aGBB738768$2bnb
016 7 $a017548825$2Uk
019 $a162588685$a646827621$a742295047$a816324350$a823121326$a935246629$a961883154$a988654417$a999443970$a1052105582$a1057931269$a1058108066$a1064619567$a1065699955$a1087437889$a1109140328$a1229613521
020 $a9780080536545$q(electronic bk.)
020 $a0080536549$q(electronic bk.)
020 $a9780444823632
020 $a0444823638
020 $a1282284975
020 $a9781282284975
020 $a9786612284977
020 $a6612284978
035 $a(OCoLC)183633551$z(OCoLC)162588685$z(OCoLC)646827621$z(OCoLC)742295047$z(OCoLC)816324350$z(OCoLC)823121326$z(OCoLC)935246629$z(OCoLC)961883154$z(OCoLC)988654417$z(OCoLC)999443970$z(OCoLC)1052105582$z(OCoLC)1057931269$z(OCoLC)1058108066$z(OCoLC)1064619567$z(OCoLC)1065699955$z(OCoLC)1087437889$z(OCoLC)1109140328$z(OCoLC)1229613521
037 $a120745:126723$bElsevier Science & Technology$nhttp://www.sciencedirect.com
050 4 $aTJ163$b.M48 1998eb
072 7 $aTJ$2lcco
072 7 $aTEC$x009070$2bisacsh
072 7 $aTGB, TGM$2bicssc
082 04 $a621$222
049 $aZCUA
245 00 $aMicro mechanical systems :$bprinciples and technology /$cedited by T. Fukuda and W. Menz.
260 $aAmsterdam ;$aNew York :$bElsevier,$c1998.
300 $a1 online resource (viii, 268 pages) :$billustrations
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
490 1 $aHandbook of sensors and actuators ;$vv. 6
504 $aIncludes bibliographical references.
588 0 $aPrint version record.
520 $aIn ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
505 0 $aFront Cover; Micro Mechanical Systems: Principles and Technology; Copyright Page; Contents; Chapter 1. Introduction; Historical Background and Parallels to Microelectronics; The Motivation for Microsystem Technology; Microphysics and Design Considerations; From the Microcomponent to the Microsystem; Chapter 2. Photolithographic Microfabrication; Basic Concepts of Planar Processing; Materials; Unit Processes; Integrated Processes; Limitations of Planar Processes; Chapter 3. Micromachining by Machine Tools; Historical Aspects; Basics of Micromachine Tools; Microtool Preparation.
505 8 $aWire Electrodischarge Grinding (WEDG)Micro EDM; Micro Mechanical Machining (MMM); Combined Method for Micromachining; Chapter 4. Tribological Aspects of Microsystems; Introduction; Tribology -- Friction, Lubrication and Wear; Surface Structure and Tribilogical Contact; Friction and Wear; Materials for Reliable Micromechanical Systems; Chapter 5. Silicon Microsensors; Introduction; Fabrication; Performance of Micromechanical Sensors; Examples of Micromechanical Sensors; Chapter 6. Micro-Actuators for Micro-Robots: Electric and Magnetic; Introduction; Electric Field Driven Actuators.
505 8 $aPiezoelectric ActuatorsMechanical Transformers; Magnetic Field Driven Actuators; Chapter 7. Energy Source and Power Supply Method; Classification of Energy Supply Methods; Internal Supply Methods; External Supply Methods and Noncontact Manipulation; The Others; Chapter 8. Control Method of Micro Mechanical Systems; Control Principle; Scaling Effects; Intelligent Control; Man-Machine Interface; Chapter 9. Examples of Microsystems; Introduction; Examples of Microsystems; Examples of Micromachines; Chapter 10. Future Problems; The Complete Microsystem.
505 8 $aThe Industrial Potential of Microsystem TechnologyThe Importance of Standardization; Outlook.
546 $aEnglish.
650 0 $aMicroelectromechanical systems$vHandbooks, manuals, etc.
650 6 $aMicrosystèmes électromécaniques$vGuides, manuels, etc.
650 7 $aTECHNOLOGY & ENGINEERING$xMechanical.$2bisacsh
650 7 $aMicroelectromechanical systems.$2fast$0(OCoLC)fst01019745
650 7 $aMikromechanik$2gnd
650 7 $aMikrosystemtechnik$2gnd
650 7 $aTecnologia.$2larpcal
650 7 $aEngenharia eletrônica.$2larpcal
650 7 $aMicroactionneurs.$2ram
650 7 $aMicrotechniques.$2ram
650 7 $aMicromécanique (ingénierie)$2ram
655 2 $aHandbook
655 4 $aElectronic books.
655 7 $aHandbooks and manuals.$2fast$0(OCoLC)fst01423877
655 7 $aHandbooks and manuals.$2lcgft
655 7 $aGuides et manuels.$2rvmgf
700 1 $aFukuda, T.$q(Toshio),$d1948-
700 1 $aMenz, W.$q(Wolfgang)
776 08 $iPrint version:$tMicro mechanical systems.$dAmsterdam ; New York : Elsevier, 1998$z9780444823632$w(DLC) 98020529$w(OCoLC)39122892
830 0 $aHandbook of sensors and actuators ;$vv. 6.
856 40 $uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio7887592$zACADEMIC - Electronics & Semiconductors
852 8 $blweb$hEBOOKS