| Record ID | marc_columbia/Columbia-extract-20221130-016.mrc:40936015:1857 |
| Source | marc_columbia |
| Download Link | /show-records/marc_columbia/Columbia-extract-20221130-016.mrc:40936015:1857?format=raw |
LEADER: 01857cam a2200361Ia 4500
001 7658590
005 20221201014444.0
008 100210t20092009paua b 101 0 eng
020 $a9781605111285
020 $a1605111287
035 $a(OCoLC)ocn505804375
035 $a(NNC)7658590
035 $a(OCoLC)505804375
035 $a7658590
040 $aLHL$cLHL$dYDXCP
090 $aTK7871.99.M44$bC1563 2009
245 00 $aCMOS gate-stack scaling-- materials, interfaces and reliability implications :$bsymposium held April 14-16, 2009 /$ceditors, Alexander A. Demkov [and others].
260 $aWarrendale, Pa. :$bMaterials Research Society,$c[2009], ©2009.
300 $aviii, 179 pages :$billustrations ;$c24 cm.
336 $atext$btxt$2rdacontent
337 $aunmediated$bn$2rdamedia
490 1 $aMRS proceedings ;$vv. 1155
500 $a" ... Symposium C, 'CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- preface.
504 $aIncludes bibliographical references and indexes.
650 0 $aMetal oxide semiconductors, Complementary$vCongresses.
650 0 $aMetal oxide semiconductors$xMaterials$vCongresses.
650 0 $aSilicides$vCongresses.
650 0 $aGate array circuits$vCongresses.
700 1 $aDemkov, Alexander A.$0http://id.loc.gov/authorities/names/no2005105976
710 2 $aMaterials Research Society.$bSpring Meeting$d(2009 :$cSan Francisco, Calif.)$0http://id.loc.gov/authorities/names/n2012068116
711 2 $aSymposium C, "CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications"$d(2009 :$cSan Francisco, Calif.)
830 0 $aMaterials Research Society symposia proceedings ;$vv. 1155.$0http://id.loc.gov/authorities/names/n42037756
852 00 $boff,eng$hTK7871.99.M44$iC1563 2009g