MARC Record from marc_columbia

LEADER: 03333cam a2200601Ia 4500
001 8972446
005 20211113224301.0
006 m o d
007 cr cn|||||||||
008 110728s2008 nyua ob 001 0 eng d
035 $a(OCoLC)ocn743217551
035 $a(NNC)8972446
040 $aKNOVL$beng$epn$cKNOVL$dOCLCQ$dDEBSZ$dOCLCQ$dKNOVL$dZCU$dKNOVL$dOCLCF$dOCLCO$dCOO$dKNOVL$dCNNAI$dOCLCQ$dVT2$dUAB$dBUF$dOCLCQ$dCEF$dRRP$dAU@$dWYU$dYOU$dOCLCQ$dERF$dOCLCO
016 7 $a014625076$2Uk
019 $a748339450$a858447343$a961884888$a988635253$a999445003$a1058076207$a1065708099
020 $a9781613441107$q(electronic bk.)
020 $a161344110X$q(electronic bk.)
020 $a9780195320176$q(pbk. ;$qalk. paper)
020 $a0195320174$q(pbk. ;$qalk. paper)
024 8 $a99938605354
035 $a(OCoLC)743217551$z(OCoLC)748339450$z(OCoLC)858447343$z(OCoLC)961884888$z(OCoLC)988635253$z(OCoLC)999445003$z(OCoLC)1058076207$z(OCoLC)1065708099
037 $bKnovel Corporation$nhttp://www.knovel.com
050 4 $aTK7871.85$b.C25 2008eb
082 04 $a621.3815/2$222
049 $aZCUA
100 1 $aCampbell, Stephen A.,$d1954-
245 10 $aFabrication engineering at the micro and nanoscale /$cStephen A. Campbell.
250 $a3rd ed.
260 $aNew York :$bOxford University Press,$c2008.
300 $a1 online resource (xiv, 647 pages) :$billustrations
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
490 1 $aThe Oxford series in electrical and computer engineering
504 $aIncludes bibliographical references and index.
505 0 $aAn introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum Science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metalization -- CMOS technologies -- Other transistor technologies -- Optoelectronic technologies -- MEMS -- Integrated circuit manufacturing.
588 0 $aPrint version record.
546 $aEnglish.
650 0 $aSemiconductors$xDesign and construction.
650 0 $aSemiconductors$xMathematical models.
650 6 $aSemi-conducteurs$xConception et construction.
650 6 $aSemi-conducteurs$xModèles mathématiques.
650 6 $aMicroélectronique.
650 6 $aNanoélectronique.
650 7 $aSemiconductors$xDesign and construction.$2fast$0(OCoLC)fst01112213
650 7 $aSemiconductors$xMathematical models.$2fast$0(OCoLC)fst01112238
655 0 $aElectronic book.
655 4 $aElectronic books.
700 1 $aCampbell, Stephen A.,$d1954-$tScience and engineering of microelectronic fabrication.
776 08 $iPrint version:$aCampbell, Stephen A., 1954-$tFabrication engineering at the micro and nanoscale.$b3rd ed.$dNew York : Oxford University Press, 2008$z0195320174$w(DLC) 2007013450$w(OCoLC)122338108
830 0 $aOxford series in electrical and computer engineering.
856 40 $uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio8972446$zACADEMIC - Electronics & Semiconductors
852 8 $blweb$hEBOOKS