MARC Record from marc_columbia

LEADER: 04716cam a2200649Ii 4500
001 15119054
005 20210607142518.0
006 m o d
007 cr cnu|||unuuu
008 170411s2017 si ob 001 0 eng d
035 $a(OCoLC)ocn982121322
035 $a(NNC)15119054
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020 $a9781315364926$q(ebook)
020 $a1315364921$q(ebook)
020 $a9781315341279$q(electronic bk.)
020 $a1315341271$q(electronic bk.)
020 $a9789814613736
020 $a9814613738
020 $a9781315322308$q(Mobipocket ebook)
020 $a1315322307
020 $z9789814613729
020 $z981461372X
035 $a(OCoLC)982121322$z(OCoLC)982142409$z(OCoLC)982224892$z(OCoLC)982341401$z(OCoLC)982351516$z(OCoLC)982397143$z(OCoLC)982439200$z(OCoLC)982599386$z(OCoLC)982607644
037 $a9781315341279$bIngram Content Group
050 4 $aTK7875
072 7 $aTEC$x009070$2bisacsh
082 04 $a621.381$223
049 $aZCUA
100 1 $aPal, Prem,$eauthor.
245 10 $aSilicon wet bulk micromachining for MEMS /$cPrem Pal, Kazuo Sato.
260 $c©2017.
264 1 $aSingapore :$bPan Stanford Publishing,$c[2017]
264 4 $c©2017
300 $a1 online resource
336 $atext$btxt$2rdacontent
337 $acomputer$bc$2rdamedia
338 $aonline resource$bcr$2rdacarrier
588 0 $aOnline resource; title from PDF title page (EBSCO, viewed April 20, 2017).
500 $aIncludes index.
520 $aMicroelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical--based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical--based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical--based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical--based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
505 0 $aA brief introduction of the crystal structure -- Brief overview of silicon wafer manufacturing and microfabrication techniques -- Isotropic etching of silicon and related materials -- KOH-based anisotropic etching -- TMAH-based anisotropic etching -- Convex and concave corners in silicon wet bulk micromachining -- Alignment of mask patterns to crystallographic directions -- Simple to complex structures using wet bulk micromachining.
504 $aIncludes bibliographical references and index.
650 0 $aMicroelectromechanical systems.
650 0 $aMicromachining.
650 7 $aTECHNOLOGY & ENGINEERING$xMechanical.$2bisacsh
650 7 $aMicroelectromechanical systems.$2fast$0(OCoLC)fst01019745
650 7 $aMicromachining.$2fast$0(OCoLC)fst01019888
655 0 $aElectronic books.
655 4 $aElectronic books.
700 1 $aSato, Kazuo,$eauthor.
776 08 $iPrint version:$aPal, Prem.$tSilicon wet bulk micromachining for MEMS.$dSingapore : Pan Stanford Publishing, [2017]$z981461372X$z9789814613729$w(OCoLC)953886622
856 40 $uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio15119054$zTaylor & Francis eBooks
852 8 $blweb$hEBOOKS