| Record ID | marc_loc_2016/BooksAll.2016.part11.utf8:28888237:1114 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part11.utf8:28888237:1114?format=raw |
LEADER: 01114cam a2200289 i 4500
001 77608011
003 DLC
005 19990716000000.0
008 770202s1977 dcua b f000 0 eng
010 $a 77608011
040 $aDLC$cDLC$dDLC
050 00 $aQC100$b.U57 no. 400-35$aTK7874
082 00 $a602/.1 s$a621.381/71/028
086 0 $aC13.10:400-35.
100 1 $aDevaney, John R.
245 10 $aNotes on SEM examination of microelectronic devices /$cJohn R. Devaney, K. O. Leedy, and W. J. Keery.
260 $aWashington :$bU.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.,$c1977.
300 $aiv, 48 p. :$bill. ;$c26 cm.
440 0 $aSemiconductor measurement technology
490 1 $aNBS special publication ; 400-35
504 $aIncludes bibliographical references.
650 0 $aMiniature electronic equipment$xTesting.
650 0 $aSemiconductors$xTesting.
650 0 $aScanning electron microscopy.
700 1 $aLeedy, Kathryn O.,$ejoint author.
700 1 $aKeery, W. J.,$ejoint author.
830 0 $aNBS special publication ;$v400-35.