| Record ID | marc_loc_2016/BooksAll.2016.part18.utf8:188441429:1075 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part18.utf8:188441429:1075?format=raw |
LEADER: 01075cam a2200301 a 4500
001 88084050
003 DLC
005 19970130112728.9
008 881220s1989 gaua b 00010 eng
010 $a 88084050 //r97
020 $a1558651020
040 $aDLC$cDLC$dDLC
043 $an-us---$an-cn---
050 00 $aHD9696.A3$bU568 1989
100 1 $aMiller, Richard Kendall,$d1946-
245 10 $aSurvey on silicon micromachining and microstructures /$cby Richard K. Miller and Terri C. Walker.
260 $aMadison, GA :$bFuture Technology Surveys,$c[c1989]
300 $a98 leaves :$bill. ;$c29 cm.
490 1 $aSurvey report ;$v#17
500 $aIncludes contributions by other researchers.
504 $aIncludes bibliographical references.
650 0 $aMicroelectronics industry$zUnited States.
650 0 $aMicroelectronics industry$zCanada.
650 0 $aMarket surveys$zUnited States.
650 0 $aMarket surveys$zCanada.
650 0 $aMicromachining.
700 1 $aWalker, Terri C.,$d1964-
830 0 $aSurvey report (Future Technology Surveys, Inc.) ;$v#17.