| Record ID | marc_loc_2016/BooksAll.2016.part19.utf8:104317736:745 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part19.utf8:104317736:745?format=raw |
LEADER: 00745pam a2200229 a 4500
001 89024240
003 DLC
005 19900412164641.4
008 890929s1990 waua b 00110 eng
010 $a 89024240
020 $a0819402710 :$c$35.00 (est.)
020 $a0819402729 (hard) :$c$50.00 (est.)
040 $aDLC$cDLC$dDLC
050 00 $aTA1695$b.J35 1990
082 00 $a621.381/531$220
100 10 $aJain, Kanti,$d1948-
245 10 $aExcimer laser lithography /$cKanti Jain.
260 0 $aBellingham, Wash., USA :$bSPIE Optical Engineering Press,$cc1990.
300 $ax, 212 p. :$bill. ;$c26 cm.
504 $aIncludes bibliographical references (p. 193-207).
650 0 $aExcimer lasers$xIndustrial applications.
650 0 $aMicrolithography.