| Record ID | marc_loc_2016/BooksAll.2016.part20.utf8:67065395:1378 |
| Source | Library of Congress |
| Download Link | /show-records/marc_loc_2016/BooksAll.2016.part20.utf8:67065395:1378?format=raw |
LEADER: 01378cam a2200301 a 4500
001 90050809
003 DLC
005 19950913140121.3
008 901015s1991 waua b 101 0 eng
010 $a 90050809 //r95
020 $a0819404624
040 $aDLC$cDLC$dDLC
050 00 $aTK7871.85$b.R3445 1991
082 00 $a621.381/52$220
245 00 $aRapid thermal and related processing techniques :$b2-3 October 1990, Santa Clara, California /$cRajendra Singh, Mehrdad M. Moslehi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
260 0 $aBellingham, Wash., USA :$bSPIE,$cc1991.
300 $aix, 422 p. :$bill. ;$c28 cm.
490 1 $aProceedings / SPIE--the International Society for Optical Engineering ;$vv. 1393
500 $aPapers presented at the SPIE Conference on Rapid Thermal and Related Processing Techniques.
504 $aIncludes bibliographical references and index.
650 0 $aSemiconductors$xHeat treatment$xCongresses.
650 0 $aSemiconductor doping$xCongresses.
650 0 $aVapor plating$xCongresses.
650 0 $aRapid thermal processing$xCongresses.
700 10 $aSingh, Rajendra,$d1946-
700 10 $aMoslehi, Mehrdad M.
710 20 $aSociety of Photo-optical Instrumentation Engineers.
830 0 $aProceedings of SPIE--the International Society for Optical Engineering ;$vv. 1393.